SSS Rev0 Vacuum Turbo Pump

PURCHASE DESCRIPTION

FOR
Vacuum Turbo Pump

SCOPE: For this Purchase Description (PD), the Turbomolecular Pumping Station will be referred to as TMPS. The TMPS will replace the Agilent Technologies/Varian TPS-compact TV301 (Model: 969-8221M003), which contains the following components: TV301 turbomolecular pump, integrated controller, variable leak valve and dry scroll backing pump. The manufacturer (Agilent/Varian) has discontinued this item and ceased its support of the key components. This acquisition will aid AFMETCAL in maintaining support for a multitude of different high-vacuum and vacuum metrology calibration equipment across the Air Force. The new standard would support high-vacuum chambers, vacuum sensors, transducers, and other similar high-vacuum TMDE. The TMPS shall evacuate vacuum TMDE up to high-vacuum levels in absolute mode.

PERFORMANCE REQUIREMENTS:

Operations: The TMPS is required to feature an integrated, oil-free, benchtop pumping system combining a turbomolecular high-vacuum pump, a dry scroll/backing pump, and an integrated system controller. The acquisition shall also contain a separate variable leak valve. The TMPS shall be a fully integrated, self-contained "plug-and-play" unit. The roughing and backing operations shall not require physical pumping or oil-sealed backing pumps to achieve high-vacuum operation. Users are expected to interact solely with the system's main interface or display panel during operation. The connection on the top of the pumping system shall be an ISO 100 Flange (ISO-LF DN 100).

Range and Pumping Speed: The TMPS shall be capable of evacuating chambers and measuring pressure across the following parameters:

The High-Vacuum Pump Speed shall be at least 215 L/s for Nitrogen The Vacuum Pressure shall obtain a vacuum of 1*10^-9 mbar The Compression Ratio for Nitrogen shall be greater than 1*10^-11

Backing Pump System:

The TMPS shall contain an integrated, oil-free dry scroll backing pump The dry scroll pump shall have a rotational speed no less than 56,000 RPM The backing pump shall be dry (scroll mechanism) to prevent any hydrocarbon contamination of the turbomolecular pump, high-vacuum chamber, and calibration standard. The backing pump shall achieve an ultimate pressure of at least 0.1 mbar or better on its own.

Environmental Requirements: The TMPS shall be able to operate or be stored in the following environmental conditions:

Operating Temperature: 41 to 95°F (5 to 35°C)
Storage Temperature: -4 to 158°F (-20 to 70°C)