Pipe Material Specification 22 00 2.1.4 replacement language

Questions:

Please provide a pipe material specification for the following systems: Domestic Water (non-cleanroom environment)
Type L Copper
Above and below ground sanitary piping (non-cleanroom environment) Only either PVC or Cast Iron acceptable
Above and below ground storm piping (non-cleanroom environment) Only either PVC or Cast Iron acceptable
Manifold gas piping is noted to be “brazed stainless steel”. This is not a typical piping method. Would welded stainless steel piping be acceptable (orbital or socket)? Provide specification and details on the double walled hazardous gases. Provide specifications on what specific steel piping is acceptable for chlorine gas piping.

**SEE BELOW**

Refer to specification section 22 00 00, replace section 2.1.4 with the following:

2.1.4 Stainless Steel Piping Systems:

2.1.4.1 General Requirements:

a. Furnish and install stainless steel oxygen, nitrogen, argon, compressed air, helium, sulfur hexafluoride, carbon tetrafluoride, trifluoromethane, hydrogen, methane, nitrogen trifluoride, deionized water supply and return, domestic cold water and domestic hot water supply and recirc piping systems serving the clean rooms and shown to be installed within.

2.1.4.2 Products:

a. Process Gases (all, everywhere shown on Drawings):
1. Pipe material shall be seamless tubing, 316L stainless steel in compliance with ASTM A-269 and A-632, factory cleaned for ultrahigh purity (UHP) gas service complying with SEMI F19 and SEMI F20, electropolished, with interior roughness no greater that 15 microinches Ra in accordance with ANSI/ASME B46.1. 2. Acceptable manufacturers of UHP stainless steel tubing would be Dockweiler, Swagelok or approved equal.
3. Pipe joints shall be orbital welded after a minimum 5 minute per 20 feet of tubing Grade 5 Argon purge cycle (of at least 25scfh) to reduce oxygen and moisture content to less than 1ppm.
4. Changes in direction shall be made with a fitting manufactured from seamless tube stock or can be made with a field bend with a minimum radius of 8 times the tube diameter (ie. 0.5” OD tube needs bend radius of 4.0”).

5. Chlorine Gas (Cl2) and Boron Trichloride (BCl3) piping systems shall include dedicated, automated nitrogen purge blocks to reduce moisture levels to less than 10ppb in accordance with ASTM F1397, SEMI E49, and SEMI F21.
6. Hazardous gases (Cl2, BCl3, H2, CH4, & NF3) shall also have a 316L stainless steel outer safety containment jacket conforming to ASTM A213 and ASTM A1016 with the assemblies leak tested to ASTM E499 and